Dutch chipmaking equipment firm ASML Holdings NV has agreed to buy Taiwanese peer Hermes Microvision Inc (HMI) for about T$100 billion ($A4.18 billion)) to strengthen the pair's technology offering for semiconductor manufacturers.
The transaction would be one of the biggest inbound acquisitions for Taiwan, an island known for its tech industry.
It comes after US memory chipmaker Micron Technology Inc said late last year that it planned to buy the remaining interest in its Taiwanese joint venture in a deal valued around $US3.2 billion ($A4.32 billion).
It would also be the latest consolidation in a global semiconductor industry faced with an increasingly saturated smartphone market - once a key growth driver - as well as the emergence of deep-pocketed Chinese players.
Late last month, Taiwan's two biggest chip testing and packaging companies said they would come together under a new holding company.
"The bigger get bigger," said chip analyst Steve Huang at Yuanta Investment Consulting.
ASML is the world's biggest chipmaking equipment supplier, with customers including Taiwan Semiconductor Manufacturing Co Ltd, Intel Corp and Samsung Electronics Co Ltd. HMI's technology is used to scan and test for wafer defects in the semiconductor manufacturing process.
Both companies, which already work together, will be able to share research, development and intellectual property under one roof, analysts said, which is key as their customers migrate toward ever smaller and more advanced manufacturing processes.
On Thursday, shares of Taiwan-listed HMI rose by their daily limit of 10 per cent, and were last trading at T$1,330.
